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Author
- Amélie, Schultheiss (1)
- Viet,Huong Nguyen (1)
Subject
- Pedot (1)
- Poly(34-ethylenedioxyt... (1)
Date issued
- 2022 (1)
Has File(s)
- false (1)
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High performance encapsulation of transparent conductive polymers by spatial atomic layer deposition Poly(3,4-ethylenedioxythiophene) (PEDOT) is a transparent conductive polymer widely used in flexible photonic and optoelectronic devices because of its excellent electrical and optical properties. However, its current range of applications is limited by its poor stability under high humidity and solar radiations. Encapsulation is an attractive solution to this problem and the development of a low-temperature and scalable deposition method is highly desirable. In this study, we report the use of spatial atomic layer deposition (SALD) to deposit ultrathin layers of ZnO, TiO2, and Al2O3. These nanolayers maintain the electrical performance of the conductive polymer and its high optical transmittance. The use of SALD ensures low-cost and flexible processing with pinhole-free high-qualit... |