Item Infomation
Title: |
Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor |
Authors: |
Kissan, Mistry Viet Huong, Nguyen Mohamed, Arabi Khaled, H. Ibrahim Hatameh, Asgarimoghaddam Mustafa, Yavuz |
Issue Date: |
2022 |
Publisher: |
American Chemical Society |
Abstract: |
A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors. |
URI: |
https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378 https://dlib.phenikaa-uni.edu.vn/handle/PNK/5768 |
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