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Author
- Shan, Dan (1)
- Sun, Daoyuan (1)
- Wang, Menglong (1)
Subject
- PECVD (1)
Date issued
- 2023 (1)
Has File(s)
- true (1)
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Various doping concentrations of boron (B)-doped germanium nanocrystal (Ge NC) films were prepared using the plasma-enhanced chemical vapor deposition (PECVD) technique followed by thermal annealing treatment. The electronic properties of B-doped Ge NCs films combined with the microstructural characterization were investigated. It is worthwhile mentioning that the Hall mobilities μHall
of Ge NCs films were enhanced after B doping and reached to the maximum of 200 cm2 V−1, which could be ascribed to the reduction in surface defects states in the B-doped films. It is also important to highlight that the temperature-dependent mobilities μH(T)
exhibited different temperature dependence trends in the Ge NCs films before and after B doping. |