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    • High performance encapsulation of transparent conductive polymers by spatial atomic layer deposition
    Authors: Amélie Schultheiss; Abderrahime, Sekkat; Viet Huong, Nguyen;  Advisor: -;  Co-Author: - (2022)

    Poly(3,4-ethylenedioxythiophene) (PEDOT) is a transparent conductive polymer widely used in flexible photonic and optoelectronic devices because of its excellent electrical and optical properties. However, its current range of applications is limited by its poor stability under high humidity and solar radiations. Encapsulation is an attractive solution to this problem and the development of a low-temperature and scalable deposition method is highly desirable. In this study, we report the use of spatial atomic layer deposition (SALD) to deposit ultrathin layers of ZnO, TiO2, and Al2O3. These nanolayers maintain the electrical performance of the conductive polymer and its high optical t...
    • Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
    Authors: Kissan, Mistry; Viet Huong, Nguyen; Mohamed, Arabi; Khaled, H. Ibrahim; Hatameh, Asgarimoghaddam; Mustafa, Yavuz;  Advisor: -;  Co-Author: - (2022)

    A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. ...
    • Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
    Authors: Kissan, Mistry; Viet Huong, Nguyen; Mohamed, Arabi;  Advisor: -;  Co-Author: - (2022)

    A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. ...