Browsing by Subject WO3 layer

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  • Authors: Nguyen, Van Toan;  Advisor: Chu, Manh Hung; Nguyen, Duc Hoa; Nguyen, Van Duy; Dang, Thi Thanh Le; Nguyen, Thi Thu Hoa; Nguyen, Ngoc Viet; Phan, Hong Phuoc; Nguyen, Van Hieu;  Co-Author: - (2021)

    The selective detection and classification of NH3 and H2S gases with H2S gas interference based on conventional SnO2 thin film sensors is still the main problem. In this work, three layers of SnO2/Pt/WO3 nanofilms with different WO3 thicknesses (50, 80, 140, and 260 nm) were fabricated using the sputtering technique. The WO3 top layer were used as a gas filter to further improve the selectivity of sensors. The effect of WO3 thickness on the (NH3, H2, and H2S) gas-sensing properties of the sensors was investigated. At the optimal WO3 thickness of 140 nm, the gas responses of SnO2/Pt/WO3 sensors toward NH3 and H2 gases were slightly lower than those of Pt/SnO2 sensor film, and the gas r...